Experimental Modal Analysis of Automotive MEMS Sensors

Dr. Steven Kehrberg

Robert Bosch GmbH Reutlingen

Tuesday, October 10, 2017, 11:00 - 12:30

Room 02-012, Georges-Köhler Allee 102, Freiburg 79110, Germany

The talk starts with an overview of Bosch automotive MEMS sensors with focus on angular rate sensors. These sensors are used for a variety of safety applications like the electronic stability program. A new test facility is developed for the characterization of the presented MEMS angular rate sensors.

This test facility is based on the principle of piezoelectric base excitation in order to meet the requirements for modal analysis of a micromachined angular rate sensor at very high frequencies. A combination of a 0.5 mm thin piezoelectric disc, a seismic mass and a damping element mounted in a vacuum chamber results in a linear frequency response over the whole frequency range from 10 to 200 kHz.